Description
ETCHConfiguration
2300 e4 with 3 Load Port and 4 Kiyo FT chambers Software: 1.8.4-SP9-CE006c-Patch-02-CF-Etch_2018-12-07-141128 • 4 Kiyo FT chambers • 3 Wafer Load port module (TDK) • Transfer Chamber • ATM robot with one end effector (Brooks) • VTM robot with dual end effectors (Brooks Mag7) • 2 wafer slot Airlock Vacuum system • N2/Purge Vent • TM control software • Communication Protocol (RS232, LON)OEM Model Description
None ProvidedDocuments
No documents
LAM RESEARCH CORPORATION
2300
Verified
CATEGORY
Dry / Plasma Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
101693
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Similar Listings
View All
LAM RESEARCH CORPORATION
2300
CATEGORY
Dry / Plasma Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
101693
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
ETCHConfiguration
2300 e4 with 3 Load Port and 4 Kiyo FT chambers Software: 1.8.4-SP9-CE006c-Patch-02-CF-Etch_2018-12-07-141128 • 4 Kiyo FT chambers • 3 Wafer Load port module (TDK) • Transfer Chamber • ATM robot with one end effector (Brooks) • VTM robot with dual end effectors (Brooks Mag7) • 2 wafer slot Airlock Vacuum system • N2/Purge Vent • TM control software • Communication Protocol (RS232, LON)OEM Model Description
None ProvidedDocuments
No documents