Description
Plasma processing systemConfiguration
No ConfigurationOEM Model Description
The 2300 Versys is a part of Lam’s 2300 etch series, which is a low-risk solution for sub-100-nm volume production on 300-mm substrates. It has a compact design that reduces floor space while providing full service access. The Versys conductor etch systems rely on Lam’s Transformer Coupled Plasma™ source and deliver superior performance. It also reduces cost of ownership to compete with the lowest cost systems in the industry.Documents
No documents
CATEGORY
Dry / Plasma Etch
Last Verified: 2 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
154596
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
LAM RESEARCH CORPORATION
2300 VERSYS
CATEGORY
Dry / Plasma Etch
Last Verified: 2 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
154596
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Plasma processing systemConfiguration
No ConfigurationOEM Model Description
The 2300 Versys is a part of Lam’s 2300 etch series, which is a low-risk solution for sub-100-nm volume production on 300-mm substrates. It has a compact design that reduces floor space while providing full service access. The Versys conductor etch systems rely on Lam’s Transformer Coupled Plasma™ source and deliver superior performance. It also reduces cost of ownership to compete with the lowest cost systems in the industry.Documents
No documents