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6" Fab For Sale from Moov - Click Here to Learn More

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6" Fab For Sale from Moov - Click Here to Learn More

HITACHI M 712

Description

No description

Configuration

Type: 300mm M712 mainframe M711 setup one Etch chamber Software revision: 1.07 PMv.02.16M Etcher, 12" (3) Cassettes Positions SECS II Interface: HSMS Neslab coolflow III Chiller Power supply: 208 VAC, 3-Phase, 50/60 Hz Mainframe: Robot P/N: CR-712V HITACHI 3 position Loader Chamber: ESC Type: Bipolar Endpoint type: Hitachi EPD monitor ePMv02.16M SHIMAZU EC TMP 3203LMC-K1 EC TMP Controller DAIHEN ES7-IIA EC Source generator PEARL CF-500-400K EC Bias generator Gas configuration: Line / EC1 / Strip 1 / Ar 2 / C12 3 / SF6 4 / HBr 5 / CF3 6 / CH4 7 / NF3 8 / O2 9 / N2 10/ SF6 11/ C12 12/ O2

OEM Model Description

None Provided

Documents

No documents

HITACHI

M 712

verified-listing-icon

Verified

CATEGORY

Dry / Plasma Etch

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

65310

Wafer Sizes:

12"/300mm

Vintage:

2006

Have Additional Questions?

Logistics Support

Available

Money Back Guarantee

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

Similar Listings

HITACHI M 712

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HITACHI M 712

HITACHI

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HITACHI M 712

HITACHI

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Dry / Plasma Etch

Vintage: 0Condition: Used

Last VerifiedOver 60 days ago

HITACHI

M 712

verified-listing-icon

Verified

CATEGORY

Dry / Plasma Etch

Last Verified: Over 60 days ago

listing-photo-4d4d568d110f486eb390b5f1a85478df-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1148/4d4d568d110f486eb390b5f1a85478df/eb970e21cae94b20902d2f66345da5fc_94032383ea9240129ee14e074224097345005c_mw.jpeg

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listing-photo-4d4d568d110f486eb390b5f1a85478df-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1148/4d4d568d110f486eb390b5f1a85478df/e154146f6c2c41c39da2dfd1ead0a2f5_bc40b1fc59a04aac9757d6ede03198c5_mw.jpeg

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Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

65310

Wafer Sizes:

12"/300mm

Vintage:

2006

Have Additional Questions?

Logistics Support

Available

Money Back Guarantee

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

Description

No description

Configuration

Type: 300mm M712 mainframe M711 setup one Etch chamber Software revision: 1.07 PMv.02.16M Etcher, 12" (3) Cassettes Positions SECS II Interface: HSMS Neslab coolflow III Chiller Power supply: 208 VAC, 3-Phase, 50/60 Hz Mainframe: Robot P/N: CR-712V HITACHI 3 position Loader Chamber: ESC Type: Bipolar Endpoint type: Hitachi EPD monitor ePMv02.16M SHIMAZU EC TMP 3203LMC-K1 EC TMP Controller DAIHEN ES7-IIA EC Source generator PEARL CF-500-400K EC Bias generator Gas configuration: Line / EC1 / Strip 1 / Ar 2 / C12 3 / SF6 4 / HBr 5 / CF3 6 / CH4 7 / NF3 8 / O2 9 / N2 10/ SF6 11/ C12 12/ O2

OEM Model Description

None Provided

Documents

No documents

Similar Listings

HITACHI M 712

HITACHI

M 712

Dry / Plasma EtchVintage: 2006Condition: UsedLast Verified:Over 60 days ago

HITACHI M 712

HITACHI

M 712

Dry / Plasma EtchVintage: 0Condition: UsedLast Verified:Over 60 days ago

HITACHI M 712

HITACHI

M 712

Dry / Plasma EtchVintage: 0Condition: UsedLast Verified:Over 60 days ago