Description

No description

Configuration

AMAT P-5000 Mark II MxP+ Dielectric Dielectric Dielectric Etch Etch/Ash/Clean - Plasma Processing Currently Configured for: 200mm Software: 4.8_26 MF: P5000 Mark II Qty 2 - MxP WEB ESC: Polymide Qty 2 - MxP+ Dielectric ESC: Ceramic Gases Used: SF6, CL2, CF4, HBR, HE/O2, CHF3, O2, AR, CH3F MFCs: 20 DIgital MFC's Unit or Horiba Robot: ROBOT ASSY 8 IN AMAT 5000 Dry Pumps: 1-BA100, 4-DS80/250 Chillers: 3 Neslab 150, 1-AMAT-0

OEM Model Description

The AMAT P5000 Etch is a magnetically enhanced reactive ion etching system (MERIE) with two functional process chambers (Chambers B & C). P5000 Chamber B is primarily used for etching silicon based dielectrics (silicon dioxide, silcon nitride, etc.) and some carbon based compounds (resist, poly imide, etc) while chamber C is mainly used for silicon etching with high selectivity to underlying dielectric such as silicon dioxide. The system can process only 4" wafers. Pieces have to be attached to a 4" wafer. Though the process chamber processes one wafer at a time, up to 25 wafers can be loaded per batch.

Documents

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APPLIED MATERIALS (AMAT)

P5000 ETCH

Verified

Dry / Plasma Etch

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

125398

Wafer Sizes:

6"/150mm, 8"/200mm

Vintage:

Unknown

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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