Description

No description

Configuration

Components: 1 x Orienter 1 x MxP Poly 2 x MxP+ Poly 1 x eMxP+ Software Version: 4.9_15 ESC Type: Polymide Endpoint: Monochromator Gases Used: NF3 CH3F CL2 HBr CHF3 Ar CF4 O2 N2 C4F8 CO Mass Flow Controllers (MFCs): 32 Digital MFCs (14-Unit or 18-Horiba) Robot: HP Robot Dry Pumps: 4 x IQDP80 2 x IQDP80/WSU151 Chillers: 5 x Neslab 150 units

OEM Model Description

The AMAT / APPLIED MATERIALS Centura 5200 is an Etchers & Ashers system. The centura 5200 can be used with 8” wafer size and oxidation etchers size is also 8”. The Centura architecture clusters four processing stations and two auxiliary chambers around a central transfer module containing an ultra-reliable magnetically-coupled vacuum robot.

Documents

No documents

APPLIED MATERIALS (AMAT)

CENTURA 5200

Verified

Dry / Plasma Etch

Last Verified: Today

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

147163

Wafer Sizes:

Unknown

Vintage:

1998

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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