Description
DPS plasma etch system Details AttachedConfiguration
Does not include: Pumps, chillers, abatement, HP robot, endpoint unit Process: DPS Fab section: Etch Software version: E4826 CIM: SECS/GEM Main system: PDU/AC rack VME controller system Centura platform (Qty 2) DPS etch chambers Factory interface: (Qty 2) Open cassettes Handler system: HP robot: None On-the-fly sensor: Installed (Qty 2) Tilt-out cassettesOEM Model Description
The AMAT / APPLIED MATERIALS Centura 5200 is an Etchers & Ashers system. The centura 5200 can be used with 8” wafer size and oxidation etchers size is also 8”. The Centura architecture clusters four processing stations and two auxiliary chambers around a central transfer module containing an ultra-reliable magnetically-coupled vacuum robot.Documents
CATEGORY
Dry / Plasma Etch
Last Verified: 8 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
153747
Wafer Sizes:
8"/200mm
Vintage:
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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APPLIED MATERIALS (AMAT)
CENTURA 5200
CATEGORY
Dry / Plasma Etch
Last Verified: 8 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
153747
Wafer Sizes:
8"/200mm
Vintage:
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available