Skip to main content
Moov logo

Moov Icon
CANON / ANELVA ILD-4100
    Description
    Complete Tool
    Configuration
    Etch
    OEM Model Description
    Anelva: ILD-4100 three-chamber cluster tool. Helicon wave source licensed from Plasma and Materials Technology (MORI source), can be configured with Helicon, RIE, and microwave downstream asher chambers, metal etch, poly etch processes.
    Documents

    No documents

    CANON / ANELVA

    ILD-4100

    verified-listing-icon

    Verified

    CATEGORY
    Dry Etch

    Last Verified: Over 60 days ago

    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    71872


    Wafer Sizes:

    Unknown


    Vintage:

    Unknown

    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Similar Listings
    View All
    CANON / ANELVA ILD-4100

    CANON / ANELVA

    ILD-4100

    Dry Etch
    Vintage: 0Condition: Used
    Last VerifiedOver 60 days ago

    CANON / ANELVA

    ILD-4100

    verified-listing-icon
    Verified
    CATEGORY
    Dry Etch
    Last Verified: Over 60 days ago
    listing-photo-6aa872872a934fa1b74fc9318de60e62-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2129/6aa872872a934fa1b74fc9318de60e62/2399722b36df4209991eab8e5c136a39_060473bb21ee4e6ea33ab8391983885d1201a_mw.jpeg
    listing-photo-6aa872872a934fa1b74fc9318de60e62-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2129/6aa872872a934fa1b74fc9318de60e62/bf96c1c21e4f4036921d745075848262_fc86f7ca9de34518abd582c5c4f4bfce1201a_mw.jpeg
    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    71872


    Wafer Sizes:

    Unknown


    Vintage:

    Unknown


    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    Complete Tool
    Configuration
    Etch
    OEM Model Description
    Anelva: ILD-4100 three-chamber cluster tool. Helicon wave source licensed from Plasma and Materials Technology (MORI source), can be configured with Helicon, RIE, and microwave downstream asher chambers, metal etch, poly etch processes.
    Documents

    No documents

    Similar Listings
    View All
    CANON / ANELVA ILD-4100

    CANON / ANELVA

    ILD-4100

    Dry EtchVintage: 0Condition: UsedLast Verified: Over 60 days ago