Description
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-Poly Furnace (Zro HiK process) -300 mm Production with Max production 100Pcs -2 IO Port ,18 Carrier Stock -Waves System CTL , Temp CTL M560 -Heater Type : VMU series , -Fork Transfer with 4+1 -2 Boat -Gas :N2,SiH4, AsH3/H2OEM Model Description
TELINDY PLUS™ is a cutting-edge thermal processing technology that combines the best features of the TELFORMULA™ minibatch system and the previous generation TELINDY™ platform. It offers improved process performance and productivity, with new enhancements such as improved maintenance access, dry gas chamber cleaning, and low O2 environment loading area control. These features contribute to yield increases by managing small particles more effectively. The highest levels of productivity are achieved by combining a 125 wafer load size with TEL’s FTPS™ responsive heater and a dual boat system option. TELINDY PLUS™ can be used for a wide range of applications, from traditional silicon treatments to leading edge ALD processes and radical oxidation. It represents the convergence of demonstrated experience and advanced technology, making it a powerful tool for thermal processing.Documents
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TEL / TOKYO ELECTRON
TELINDY PLUS
Verified
CATEGORY
Furnaces / Diffusion
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
65729
Wafer Sizes:
12"/300mm
Vintage:
2009
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Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
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Refurbishment Services
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TEL / TOKYO ELECTRON
TELINDY PLUS
Verified
CATEGORY
Furnaces / Diffusion
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
65729
Wafer Sizes:
12"/300mm
Vintage:
2009
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
-Poly Furnace (Zro HiK process) -300 mm Production with Max production 100Pcs -2 IO Port ,18 Carrier Stock -Waves System CTL , Temp CTL M560 -Heater Type : VMU series , -Fork Transfer with 4+1 -2 Boat -Gas :N2,SiH4, AsH3/H2OEM Model Description
TELINDY PLUS™ is a cutting-edge thermal processing technology that combines the best features of the TELFORMULA™ minibatch system and the previous generation TELINDY™ platform. It offers improved process performance and productivity, with new enhancements such as improved maintenance access, dry gas chamber cleaning, and low O2 environment loading area control. These features contribute to yield increases by managing small particles more effectively. The highest levels of productivity are achieved by combining a 125 wafer load size with TEL’s FTPS™ responsive heater and a dual boat system option. TELINDY PLUS™ can be used for a wide range of applications, from traditional silicon treatments to leading edge ALD processes and radical oxidation. It represents the convergence of demonstrated experience and advanced technology, making it a powerful tool for thermal processing.Documents
No documents
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