ALPHA-8S
Diffusion and Oxidation Furnaces
ALPHA-8S is the long-seller batch thermal processing system for silicon wafers up to 200mm. Maximizing the efficiency and productivity through continuous improvement, as a result, ALPHA-8S set the standard for vertical furnace. The system provides a wide range of process applications such as Wet/Dry Oxidation, Anneal, LPCVD of Si, Si3N4 and SiO2. Various type of UGK (Up Grade Kit) are available, which include a GUI controller and other options to enhance its productivity and expand the product’s life. Successor to Alpha 8, 100-200mm vertical, improved user interfaces available.
11
Inspection, Insurance, Appraisal, Logistics
Diffusion and Oxidation Furnaces
Diffusion and Oxidation Furnaces
Diffusion and Oxidation Furnaces
Diffusion and Oxidation Furnaces
Diffusion and Oxidation Furnaces
Diffusion and Oxidation Furnaces
Diffusion and Oxidation Furnaces
Diffusion and Oxidation Furnaces