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ALPHA-8S

Overview

ALPHA-8S is the long-seller batch thermal processing system for silicon wafers up to 200mm. Maximizing the efficiency and productivity through continuous improvement, as a result, ALPHA-8S set the standard for vertical furnace. The system provides a wide range of process applications such as Wet/Dry Oxidation, Anneal, LPCVD of Si, Si3N4 and SiO2. Various type of UGK (Up Grade Kit) are available, which include a GUI controller and other options to enhance its productivity and expand the product’s life.

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