DD-802V for diffusion.
The vertical reactor can accommodate 120 150mm wafers and up to 165 in the future.

KOKUSAI-ELECTRIC (KE)

DD-802V

MISSING PARTS:
(1 set) Quartz wares - process tube, etc.

Software OS: CX1000
Equipment status: Out of Fab
Process: PYRO
Type: Diffusion
Air valve: FUJIKIN
MFC, MFM: STEC
Three phase power: 1Ø AC 200V
Single phase power: 1Ø AC 200V
Gas: PN2 / H2 / O2

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1.jpg

MISSING PARTS:
(1 set) Quartz wares - process tube, etc.

Software OS: CX1000
Equipment status: Out of Fab
Process: POLY-Si
Type: Diffusion
Air valve: FUJIKIN
MFC, MFM: STEC
Three phase power: 1Ø AC 200V
Single phase power: 1Ø AC 200V
Gas: N2 / SiH4

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MISSING PARTS:
(1 set) Quartz wares - process tube, etc.

Software OS: CX1000
Equipment status: Out of Fab
Process: N2 ANNEAL
Type: Diffusion
Air valve: FUJIKIN
MFC, MFM: STEC
Three phase power: 3Ø AC 200V
Single phase power: 1Ø AC 200V
Main/APC: EC-5000
Gas: N2

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