Description
KLA-Tencor Surfscan 6200 particle counter . Installed in Clean-room..Configuration
Working - Wafer Size : 4 - 8 inch. - Non-patterned surface Inspection System. - 0.1 micron Defect Sensitivity (PSL STD). - 0.02 ppm Haze Sensitivity. - 0.002 ppm Haze Resolution. - Accuracy within 1%. - XY coordinates. - Lock Down accessories. - Tencor approved blower assembly. - 30mW New Ar-Laser - 208V/60HZ, 17A. - MS-DOS 6.22 ,Windows 3.1. - Software version: 2.1.OEM Model Description
The Surfscan 6200 is a tool that is capable of detecting defects as small as 0.09 µm with an 80% capture rate. It can locate, measure the size of, and count these defects to provide detailed information about the surface being analyzed.Documents
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KLA
SURFSCAN 6200
Verified
CATEGORY
Defect Inspection
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
65986
Wafer Sizes:
8"/200mm
Vintage:
1994
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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KLA
SURFSCAN 6200
Verified
CATEGORY
Defect Inspection
Last Verified: 24 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
65986
Wafer Sizes:
8"/200mm
Vintage:
1994
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
KLA-Tencor Surfscan 6200 particle counter . Installed in Clean-room..Configuration
Working - Wafer Size : 4 - 8 inch. - Non-patterned surface Inspection System. - 0.1 micron Defect Sensitivity (PSL STD). - 0.02 ppm Haze Sensitivity. - 0.002 ppm Haze Resolution. - Accuracy within 1%. - XY coordinates. - Lock Down accessories. - Tencor approved blower assembly. - 30mW New Ar-Laser - 208V/60HZ, 17A. - MS-DOS 6.22 ,Windows 3.1. - Software version: 2.1.OEM Model Description
The Surfscan 6200 is a tool that is capable of detecting defects as small as 0.09 µm with an 80% capture rate. It can locate, measure the size of, and count these defects to provide detailed information about the surface being analyzed.Documents
No documents