Description

KLA-Tencor Surfscan 6200 particle counter . Installed in Clean-room..

Configuration

Working - Wafer Size : 4 - 8 inch. - Non-patterned surface Inspection System. - 0.1 micron Defect Sensitivity (PSL STD). - 0.02 ppm Haze Sensitivity. - 0.002 ppm Haze Resolution. - Accuracy within 1%. - XY coordinates. - Lock Down accessories. - Tencor approved blower assembly. - 30mW New Ar-Laser - 208V/60HZ, 17A. - MS-DOS 6.22 ,Windows 3.1. - Software version: 2.1.

OEM Model Description

The Surfscan 6200 is a tool that is capable of detecting defects as small as 0.09 µm with an 80% capture rate. It can locate, measure the size of, and count these defects to provide detailed information about the surface being analyzed.

Documents

No documents

KLA

SURFSCAN 6200

Verified

Defect Inspection

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

65986

Wafer Sizes:

8"/200mm

Vintage:

1994

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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