Description
Wafer Inspection System Details AttachedConfiguration
· Tencor 6100 Detection: 0.16 micron on Bare Silicon. · Red Laser 632 nm, matches 4500 data · Advanced Data output/GEM SECS · System Circuit Boards! · Tencor 6100OEM Model Description
The Surfscan 6100 is a tool that is capable of detecting defects on a surface. It can locate, measure the size of, and count the number of defects that are as small as 0.157 micrometers in size. Additionally, it has a high capture rate of 95%, meaning it can accurately detect the vast majority of defects present on a surface.Documents
No documents
Verified
CATEGORY
Defect Inspection
Last Verified: 10 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled
Product ID:
148640
Wafer Sizes:
4"/100mm, 6"/150mm, 8"/200mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Similar Listings
View All
KLA
SURFSCAN 6100
CATEGORY
Defect Inspection
Last Verified: 10 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled
Product ID:
148640
Wafer Sizes:
4"/100mm, 6"/150mm, 8"/200mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Wafer Inspection System Details AttachedConfiguration
· Tencor 6100 Detection: 0.16 micron on Bare Silicon. · Red Laser 632 nm, matches 4500 data · Advanced Data output/GEM SECS · System Circuit Boards! · Tencor 6100OEM Model Description
The Surfscan 6100 is a tool that is capable of detecting defects on a surface. It can locate, measure the size of, and count the number of defects that are as small as 0.157 micrometers in size. Additionally, it has a high capture rate of 95%, meaning it can accurately detect the vast majority of defects present on a surface.Documents
No documents