The Candela CS920 is the first integrated surface and photoluminescence defect detection system for Silicon Carbide wafers. It has a UV laser for high sensitivity to defects and can detect and classify SiC epitaxy layer surface defects and crystal defects. These features help improve epitaxy yield.

KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

CANDELA CS920

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