Description
Metrology / inspection systemConfiguration
Known issues: Not included: SGB Board; Exhaust Tubing Hose 3" Metallic; G5 Host Node; TCD Board; (Qty 13) G5 Nodes and RTAP Robot Handler Inspection Unit FOUP Factory Interface Process: Brightfield Inspection Software Version: 104507 CIM: SECS/GEMOEM Model Description
The 2367 UV/visible brightfield inspector is sensitive to a broad range of defects for 65nm and above design nodes. It has improved throughput, high defect sampling, and is field-upgradeable from any 23xx systems. It has a 2x data rate increase, low false count rate, and automatic defect classification algorithms. It can be used with 28xx inspection systems and other KLA-Tencor tools. It also has a Process Window Qualification application for detecting systematic defects.Documents
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KLA
2367
CATEGORY
Defect Inspection
Last Verified: 6 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
154831
Wafer Sizes:
12"/300mm
Vintage:
2009
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Metrology / inspection systemConfiguration
Known issues: Not included: SGB Board; Exhaust Tubing Hose 3" Metallic; G5 Host Node; TCD Board; (Qty 13) G5 Nodes and RTAP Robot Handler Inspection Unit FOUP Factory Interface Process: Brightfield Inspection Software Version: 104507 CIM: SECS/GEMOEM Model Description
The 2367 UV/visible brightfield inspector is sensitive to a broad range of defects for 65nm and above design nodes. It has improved throughput, high defect sampling, and is field-upgradeable from any 23xx systems. It has a 2x data rate increase, low false count rate, and automatic defect classification algorithms. It can be used with 28xx inspection systems and other KLA-Tencor tools. It also has a Process Window Qualification application for detecting systematic defects.Documents
No documents