Description
Metrology / inspection systemConfiguration
Stage Handler Main Body (Qty 2) SMIF Factory Interface Process: DFEC Software Version: KLA2138 CIM: SECOEM Model Description
The KLA-2138 is an inline wafer inspection system that uses ultra-broadband technology to detect a wide range of yield-relevant defects on all process layers at high speeds. It features improved brightfield optics, Segmented Auto Threshold technology, and an ultra-broadband illumination source for increased sensitivity and faster setup times. An integrated SMIF minienvironment is also available to streamline automation and reduce fab cleanliness requirements.Documents
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KLA
2138
CATEGORY
Defect Inspection
Last Verified: 6 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
137875
Wafer Sizes:
8"/200mm
Vintage:
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available