KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

The Surfscan® SP1 is an unpatterned surface inspection system that provides the sensitivity, repeatability, surface quality measurements and throughput capabilities required for 0.18 µm process technologies and beyond. It is designed for wafer, equipment and IC manufacturers. The SP1 provides 0.08 µm sensitivity on well-polished silicon at 95% capture, as well as throughputs of up to 150 wph on 200 mm wafers, and up to 100 wph on 300 mm wafers.

KLA

SP1 CLASSIC

Defect Inspection

Similar Listings

KLA

SP1 CLASSIC

KLA

SP1 CLASSIC

SP1 CLASSIC

Defect Inspection

Similar Listings

KLA

SP1 CLASSIC

KLA

SP1 CLASSIC