Description

Patterned / Unpatterned: patterened SECS/GEM: Yes

Configuration

KLA SURFSCAN 7700 - Defect inspection system Dimensions & weight estimates: Mainframe dim (cm): 135 x 95 x 172 Mainframe weight (kg): 1000

OEM Model Description

Surfscan 7700 is an in-line equipment that monitors contamination on all types of devices with an optimal sensitivity of 0.15 micron. It can detect contaminants below 0.20 micron on complex process levels and multiple systems can be correlated using the same inspection recipes. It also has a microscope review option for on-line classification of contaminants.

Documents

No documents

KLA

SURFSCAN 7700

Verified

Defect Inspection

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

132898

Wafer Sizes:

6"/150mm

Vintage:

1996

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

Similar Listings