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SEMVISION G2 LITE
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Defect InspectionOverview
The SEMVision G2 is a system that makes possible high-quality topographical images of tiny and shallow defects. Its detection assembly and processing enable high aspect ratio imaging through high dynamic range detection, collection of back-scattered electrons, and energy filtering.. The SEMVision G2 is a line of defect review and analysis tools for 65nm manufacturing and beyond. It can accelerate customers’ production ramp by rapidly identifying the root cause of systematic and yield-limiting defects.
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