
Description
Deposition chamberConfiguration
Chamber only W deposition CHA: LFW CHB: WCN CHC: PCMax2 DegasOEM Model Description
Lam Research's ALTUS family is a suite of semiconductor processing equipment designed for advanced thin-film metallization (contacts, vias, plugs, 3D NAND wordlines, and interconnects).Documents
No documents
Verified
CATEGORY
CVD
Last Verified: 3 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
155203
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
LAM RESEARCH CORPORATION
Altus
CATEGORY
CVD
Last Verified: 3 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
155203
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Deposition chamberConfiguration
Chamber only W deposition CHA: LFW CHB: WCN CHC: PCMax2 DegasOEM Model Description
Lam Research's ALTUS family is a suite of semiconductor processing equipment designed for advanced thin-film metallization (contacts, vias, plugs, 3D NAND wordlines, and interconnects).Documents
No documents