Description
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Platform - Inline type Foup - 4 Foup Wafer Flow - Right to Left (R->L) Chamber Block - 12C8D CGHP - 12 ea CGHA - 12ea CADH - 8ea CSWP - 4 ea WEE - 2 ea Nozzle - MGP Nozzle THC - 2ea Chemical Box - 2ea Interface - Interface + IFB Power - AC Power Box Tower - Side Tower Details AttachedOEM Model Description
It enables higher throughput, increases wafers per day, and improves overall equipment efficiency. Additionally, it also meets industry requirements for versatile lithography equipment capable of leading edge processes, including double patterning.Documents
CATEGORY
Coaters & Developers
Last Verified: 11 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
152809
Wafer Sizes:
12"/300mm
Vintage:
2015
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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TEL / TOKYO ELECTRON
LITHIUS Pro V-i
CATEGORY
Coaters & Developers
Last Verified: 11 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
152809
Wafer Sizes:
12"/300mm
Vintage:
2015
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available