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TEL / TOKYO ELECTRON LITHIUS Pro-i
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:95576

    Wafer Sizes:12"/300mm

    Vintage:2010

    Description

    COT/DEV

    Configuration

    L->R, 4FOUP, 9C6D, CGHP6, CPHP6, CGHA12, CEHP6, AC Power Rack, Chemical Box, TCU, T&H

    Documents
    No documents
    OEM Model Description

    The CLEAN TRACK™ LITHIUS Pro™/LITHIUS Pro™ ーi is a 300mm process coater/developer that offers enhanced productivity and a significantly decreased footprint. It supports advanced immersion lithography through innovative modules and integrated metrology for advanced process control solutions. This platform improves upon the core track concepts of OEE (Overall Equipment Efficiency) and lower CoO (Cost of Ownership). In summary, the CLEAN TRACK™ LITHIUS Pro™/LITHIUS Pro™ ーi is a highly efficient and cost-effective solution for advanced immersion lithography.

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