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TEL / TOKYO ELECTRON LITHIUS Pro

Description

Clean Track Lithius Pro - Coater / Developer

Configuration

Details Attached Main Configuration: Carrier Station (Loader) Process Block (Coater/Developer Cups) COT Cabinet (Coater Chemical Cabinet) DEV Cabinet (Developer Chemical Cabinet) Dev Cabinet Coater (QTY 6) Developer (QTY 9)

OEM Model Description

The CLEAN TRACK™ LITHIUS Pro™ is a state-of-the-art 300mm process coater/developer that offers enhanced productivity and a significantly decreased footprint. It supports advanced immersion lithography through its innovative modules and integrated metrology, providing advanced process control solutions. Additionally, this platform improves upon the core track concepts of OEE (Overall Equipment Efficiency) and lower CoO (Cost of Ownership), making it a cost-effective and efficient solution for your lithography needs.

Documents

TEL LITHIUS Pro Parts Tool Datasheet_.pdf

TEL / TOKYO ELECTRON

LITHIUS Pro

verified-listing-icon

Verified

CATEGORY

Coaters & Developers

Last Verified: 3 days ago

Key Item Details

Condition:

Parts Tool

Operational Status:

Deinstalled

Product ID:

155171

Wafer Sizes:

12"/300mm

Vintage:

Unknown

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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verified-listing-icon

Verified

CATEGORY

Coaters & Developers

Last Verified: 3 days ago

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Key Item Details

Condition:

Parts Tool

Operational Status:

Deinstalled

Product ID:

155171

Wafer Sizes:

12"/300mm

Vintage:

Unknown

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

Description

Clean Track Lithius Pro - Coater / Developer

Configuration

Details Attached Main Configuration: Carrier Station (Loader) Process Block (Coater/Developer Cups) COT Cabinet (Coater Chemical Cabinet) DEV Cabinet (Developer Chemical Cabinet) Dev Cabinet Coater (QTY 6) Developer (QTY 9)

OEM Model Description

The CLEAN TRACK™ LITHIUS Pro™ is a state-of-the-art 300mm process coater/developer that offers enhanced productivity and a significantly decreased footprint. It supports advanced immersion lithography through its innovative modules and integrated metrology, providing advanced process control solutions. Additionally, this platform improves upon the core track concepts of OEE (Overall Equipment Efficiency) and lower CoO (Cost of Ownership), making it a cost-effective and efficient solution for your lithography needs.

Documents

TEL LITHIUS Pro Parts Tool Datasheet_.pdf

Similar Listings

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