Description

No description

Configuration

Configuration : 4C3D + 1Tarc Unit Main Controller Typ has one HDD. Equipment is on standby since May 2025 ( not in production line) The central media supply is still connected, resistors are uninstalled, resist pumps are under solvent. The system is complete with all parts.

OEM Model Description

CLEAN TRACK™ ACT™ 8 is a state-of-the-art Coater/Developer designed for 75-200mm wafers. It offers stable, high-quality processing and enables a smooth transition from R&D to volume production. When used in-line with the exposure tool, the system has a similar footprint to its predecessors, but provides higher throughput due to its faster wafer transfer speed. The uptime has improved due to the increased reliability of components and ease of maintenance. The platform also uses a chemical filter and a high precision oven to support DUV processing. This makes it an ideal choice for those looking for a reliable and efficient Coater/Developer.

Documents

No documents

TEL / TOKYO ELECTRON

ACT 8

Verified

Coaters & Developers

Last Verified: Yesterday

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

128764

Wafer Sizes:

8"/200mm

Vintage:

2004

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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