Description

Wafer Backside Rinse Wafer Handling: Standard Robot Mini-Environment Cassette to cassette Accessories: MAXIPEC-3000 Air conditioning and filtration unit specifically designed for Falcon system providing class 10 environment.

Configuration

Number of Photoresist Develop Stations 1 Number of Photoresist Dispenses 2 Number of Vapor Prime Hot Plates 1 Number of Hot Plates 5 Number of Chill Plates 4 Number of Cassette Elevators 2 System configured for Anti-reflective coating (A.R.C) and Ebeam Resist.

OEM Model Description

The KARL SUSS ACS 200 is a fully automatic coater/developer system for 200mm wafers. KARL SUSS ACS 200 include HVM and R&D in Advanced Packaging, MEMS and LED. Now on its 3rd generation, the KARL SUSS ACS 200 has the highest process module count of any 200 mm coater / developer on the market. Automated equipment insures that all process steps are completed in a systematic, reproducible manner without variation inherent with manual operations. The Suss system may be configured with two or more coating systems, up to six hot plate units and an aqueous developer system. Substrates of many sizes, shapes may be processed simultaneously through any desired series of process steps or recipe.

Documents

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SUSS MicroTec / KARL SUSS

ACS200

Verified

Coaters & Developers

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

123219

Wafer Sizes:

8"/200mm

Vintage:

2001

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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