Description

Photoresist coating machine Model: ACS200 200AA129 Photoresist/coater: 2 (inches) Kit: Cyborpump and kit controller InLinesystem: None Automatic supply system for solvent and developer: None Description: Coater x 2 • Hot-plate x 2 • Cool-plate x 1 • Gencobot8/3L wafer handling robot • Gen-mark robo Power supply: 208 V, 3 phase, AC transformer

Configuration

No Configuration

OEM Model Description

The KARL SUSS ACS 200 is a fully automatic coater/developer system for 200mm wafers. KARL SUSS ACS 200 include HVM and R&D in Advanced Packaging, MEMS and LED. Now on its 3rd generation, the KARL SUSS ACS 200 has the highest process module count of any 200 mm coater / developer on the market. Automated equipment insures that all process steps are completed in a systematic, reproducible manner without variation inherent with manual operations. The Suss system may be configured with two or more coating systems, up to six hot plate units and an aqueous developer system. Substrates of many sizes, shapes may be processed simultaneously through any desired series of process steps or recipe.

Documents

No documents

SUSS MicroTec / KARL SUSS

ACS200

Verified

Coaters & Developers

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

112537

Wafer Sizes:

8"/200mm

Vintage:

Unknown

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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