Description
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Software Version Standard CIM SECS GEM Process EBARA/F-REX-300/CMP TUNGSTEN Main System Main Tool 1 OK Handler System Standard 1 OK Factory Interface FOUP 4 OKOEM Model Description
This 300mm CPM system uses EBARA’s Dry-In/ Dry-Out processing and two-head/ two platen design for maximum operation flexibility. Features include 3-step cleaning, 4 FOUP loading ports, and buff stations.Documents
No documents
EBARA
F-REX300
Verified
CATEGORY
CMP
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
105057
Wafer Sizes:
12"/300mm
Vintage:
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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EBARA
F-REX300
CATEGORY
CMP
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
105057
Wafer Sizes:
12"/300mm
Vintage:
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
Software Version Standard CIM SECS GEM Process EBARA/F-REX-300/CMP TUNGSTEN Main System Main Tool 1 OK Handler System Standard 1 OK Factory Interface FOUP 4 OKOEM Model Description
This 300mm CPM system uses EBARA’s Dry-In/ Dry-Out processing and two-head/ two platen design for maximum operation flexibility. Features include 3-step cleaning, 4 FOUP loading ports, and buff stations.Documents
No documents