DISCO develops, manufactures, and sells precision machines and precision processing tools.

DISCO

CMP polisher designed to process hard-to-process materials such as sapphire and SiC
Φ200 mm                1 axis, 2 chuck tables                 Wafer Thinning               Stress Releaf

Fully automatic operation
The DFP8141 is a fully automatic polisher which performs CMP processing from cassette to cassette. With the installation of a cleaning station, wafer cleaning and drying after processing are performed automatically.

For small workpieces made of difficult-to-process materials
The DFP8141 supports CMP for materials such as sapphire, SiC, LT, and LN.

DISCO

DFP8141

CMP

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DFP8141

CMP

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