Description
Cleaning Side Only - Polishing Side Not Included Details attachedConfiguration
Walking Beam Assembly Input Station Transfer Robot: Brooks Model: WTM-511-2-FWS02-V1-CU Delivery Tank: Megasonic Tank Megasonics Delivery Type: 2 x Pressurized Vessel Megasonic Generator: 600W 2ea Megasonic Heater Brush 1 Delivery: Pressurized Vessel Brush 2 Delivery: Pressurized Vessel Heater Lamp SRD Exhaust & Drain Lines: Single Output station SRD Finger Orion ControllerOEM Model Description
The Applied Reflexion CMP system is Applied Materials' 300mm CMP platform delivering innovation and productivity for 100nm and beyond. Based on the production-proven Applied Mirra Mesa CMP architecture, the Applied Reflexion system offers 300mm processing capabilities for oxide, STI, polysilicon, tungsten, and copper applications. Titan Head technology delivers excellent dishing and erosion performance with better repeatability. The system's FullScan endpoint system enables superior process results by scanning the entire wafer. Applied Reflexion's cleaner offers a two-stage brush scrub with single-wafer megasonics in vertical orientation to minimize footprint. Its space efficient design also features factory automation and advanced process control with integrated film thickness metrology and particle monitoring options, as well as a dual wafer robot which increases tool throughput for thin films.Documents
APPLIED MATERIALS (AMAT)
REFLEXION
Verified
CATEGORY
CMP
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled
Product ID:
104465
Wafer Sizes:
12"/300mm
Robot:
Brooks Automation: WTM-511-2-FWS02-V1-CU
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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APPLIED MATERIALS (AMAT)
REFLEXION
CATEGORY
CMP
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled
Product ID:
104465
Wafer Sizes:
12"/300mm
Robot:
Brooks Automation: WTM-511-2-FWS02-V1-CU
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available