Description
-The tool is configured for 150 mm -Minor issue with an unstable high‑voltage module, but it can be repaired by the OEMConfiguration
No ConfigurationOEM Model Description
The electron optical system of the Model S-9260 CD-SEM has a 3-nm image resolution, which is applicable to lines/spaces and hole patterns of less than 0.1 µm. Figs. 2 and 3 show examples of observations of the model. It has formula-editor and beam-tilt observation functions that enable detecting process variations early and controlling them easily.Documents
No documents
Similar Listings
View All
HITACHI
S-9260A
CATEGORY
CD-SEM
Last Verified: 5 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
142218
Wafer Sizes:
6"/150mm, 8"/200mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
-The tool is configured for 150 mm -Minor issue with an unstable high‑voltage module, but it can be repaired by the OEMConfiguration
No ConfigurationOEM Model Description
The electron optical system of the Model S-9260 CD-SEM has a 3-nm image resolution, which is applicable to lines/spaces and hole patterns of less than 0.1 µm. Figs. 2 and 3 show examples of observations of the model. It has formula-editor and beam-tilt observation functions that enable detecting process variations early and controlling them easily.Documents
No documents