Description
Details AttachedConfiguration
Line power/frequency - ~230 VAC / 50 Hz Line voltage fluctuations - +/-10% Power capacity - 6,0 kVa Power consumption - 4,5 kVa Main connector - IEC309, 32A, 3-pol (blue) Cable (length, diameter) - 10m, 3-wire, 6 mm2 Grounding - < 100 Ohms Compressed Air - 600 to 880 kPa Nitrogen supply pressure - 200 to 680 kPa Process vacuum pressure - 1.3 to 21.3 kPa Pre vacuum pump exhaust - 6 m3/min Standard transformer - Isoltra UI 210/73S Standard vacuum pump - Edwards XDS 35i Standard chiller - Van der Heijden HTE600 LG Stray Magnetic Field Parameters: Accelerating voltage: 1 kV : Magnification: 40 kX AC Magnetic Field: - Horizontal 300 nT - Vertical 300 nT DC Field Fluctuation (p-p): - Horizontal 100 nT - Vertical 100 nT DC Field Fluctuation (p-p) per time: - Horizontal 100 nT/min - Vertical 100 nT/minOEM Model Description
The Hitachi S-9220 CD-SEM is a high-resolution, automated tool for precise CD measurements. It is designed for inline process control and development in semiconductor manufacturing. With programmable addressing and pattern recognition, it accurately measures various structures. It supports 6-inch and 8-inch wafer loading and provides easy data access via Hitachi software and a Data Station. The S-9220 CD-SEM is an essential tool for semiconductor manufacturers, offering superior resolution and automation for reliable CD measurements.Documents
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HITACHI
S-9220
CATEGORY
CD-SEM
Last Verified: 7 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Down
Product ID:
146797
Wafer Sizes:
8"/200mm
Vintage:
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available