Description
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Resolution 5nm, Repeatability 1%, CD range ≥0.1μm Original spec 8inch Si Notched Modified spec 4/6/8inch Si/ SiC/ GaAs/ GaNOEM Model Description
20 (automatic operation) (6-inch wafer, 5-point measurement) wafer sizes: 5, 6, 8Documents
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HITACHI
S-8820
CATEGORY
CD-SEM
Last Verified: Over 60 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
131706
Wafer Sizes:
4"/100mm, 6"/150mm, 8"/200mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
Resolution 5nm, Repeatability 1%, CD range ≥0.1μm Original spec 8inch Si Notched Modified spec 4/6/8inch Si/ SiC/ GaAs/ GaNOEM Model Description
20 (automatic operation) (6-inch wafer, 5-point measurement) wafer sizes: 5, 6, 8Documents
No documents