Description
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Robot: MECS Modell: UTC820Z Measuring size: 0.1-10µm (was used with somewhat reduced precision up to 30µm) SECS/GEM: is installed, S6F9/S2F17/S2F18 have been used Objective lens: thin aperture with heater, electromagnetic condenser and FCM objective lens system Voltage: 700-1300V CCD Camera: optical field of view 1.2 x 1.2mm. black/white image SW Version: System 15.27, Host 15.26, SEM 15.27, IPS 15.27 (4400), Stage 2.13, Evac 1.06, HV 3.00, WT 2.03 OS: HP-UX Load port, SMIF or Cassette?: open Cassette, 2 ports, no slot mappingOEM Model Description
20 (automatic operation) (6-inch wafer, 5-point measurement) wafer sizes: 5, 6, 8Documents
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HITACHI
S-8820
CATEGORY
CD-SEM
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
133570
Wafer Sizes:
Unknown
Vintage:
1996
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
Robot: MECS Modell: UTC820Z Measuring size: 0.1-10µm (was used with somewhat reduced precision up to 30µm) SECS/GEM: is installed, S6F9/S2F17/S2F18 have been used Objective lens: thin aperture with heater, electromagnetic condenser and FCM objective lens system Voltage: 700-1300V CCD Camera: optical field of view 1.2 x 1.2mm. black/white image SW Version: System 15.27, Host 15.26, SEM 15.27, IPS 15.27 (4400), Stage 2.13, Evac 1.06, HV 3.00, WT 2.03 OS: HP-UX Load port, SMIF or Cassette?: open Cassette, 2 ports, no slot mappingOEM Model Description
20 (automatic operation) (6-inch wafer, 5-point measurement) wafer sizes: 5, 6, 8Documents
No documents