The Storm Series offers advanced centrifugal spray cleaning solutions, ideal for carriers, boxes, and specifically the 300mm Front Opening Unified Pods (FOUPs) and Front Opening Shipping Boxes (FOSBs). Comprising the high-capacity Storm II and the economical Storm III, these cleaners are adept at handling cassette or carrier sizes up to 200mm. Notably, the Storm300 efficiently cleans and dries eight 300mm FOUPs and their doors in under 30 minutes, and can process up to 30 cassettes or FOUPs/FOSBs within an hour. Some of its standout advantages include its cost-effectiveness, making it the world's most economical cassette/box washer, and its high productivity. The Storm's notable features include its ability to rotate products through a DI water spray with an optional surfactant, ensuring thorough cleaning; a centrifugal acceleration drying system complemented by ULPA filtered and heated air; and a user-friendly dual color touch screen interface. Made from electropolished stainless steel, the Storm also boasts an anti-static system, a brushless DC motor drive, and the option for through-the-wall installation, ensuring both efficiency and durability.

Designed, developed & manufactured high performance and precision chemical processing equipment. Products included electrochemical deposition systems for electroplating copper, gold, solder and other metals; surface preparation systems for cleaning, stripping and etching silicon wafers; and wafer transport container cleaning systems.

SEMITOOL

STORM III

NGK FILTECH

MEGCON II

SPEEDLINE / ACCEL

MicroLine

Stand-alone wafer cleaning unit, A-CS-1OOA will provide best solution for cleaning and drying the wafer such as sawn with semi-automatic dicing saws. High-pressure water spray up to 10 MPa driven by horizontal swinging arm will achieve excellent cleaning quality.
■ Maximum rotation speed of spinning table is up to 3,000 min-1
■ Available frame size: 5 to 8"
■ Cleaning method: High-pressure
Rinse Air dry (Driven by swing arm)

ACCRETECH next generation systems support optimum device productions.

Cassette Cleaning System / Box Washers

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Top Products for Cassette Cleaning System / Box Washers

STORM III

MEGCON II

MicroLine

A-CS-100A