The Matrix System One Model 105 Asher is a single chamber, automatic microprocessor-controlled photoresist stripper that is set up for 4″ – 6″ wafers. It is configured for up to 6″ wafers and has independent control of pressure, RF power, temperature, gas flow, & substrate position. The Matrix 105 Asher has a 600W RF water-cooled generator and a multi-step program (three steps + over etch) process program. It also has a “Butterfly” Valve for more precise pressure control and a phase magnitude detector to provide real-time RF impedance matching control. The Matrix 105 Asher has two Mass Flow Controllers and a Vacuum Hose Assembly. The range for Strip is 150C to 250C +/-5C and the range for Descum is 70C to 150C +/-5C. It also has a Wafer Lift Pin Assembly (up and down).

MATRIX

The System 1 family of ashers and etchers remains a reliable and cost-effective solution for semiconductor IC fabs, optoelectronics, Thin Film Head/Data Storage, and MicroElectro-Mechanical Systems (MEMS) in Silicon, Gallium Arsenide, and Indium Phosphide processing. Handle wafer sizes ranging from 50mm to 150mm round and 4.5" square with ease.

MATRIX

Overview

Active Listings

Total Products

Services

Top MATRIX Ashers

105

SYSTEM ONE

106

SYSTEM TEN

List it with Moov and find the perfect buyer in no time at all.

All MATRIX Ashers