Description
We can refurbish (to the customers specifics) any of the Matrix System One tools (including 104, 105, 105CD, 106, 303, 205, 206). We offer multiple upgrades including the Zion Advanced User Interface with built in SECS/GEM. The HINE ATM-4 robot. Multiple other upgrades. We can configure these tools from 3"-6" (75-150mm).Configuration
No ConfigurationOEM Model Description
The Matrix System One Model 105 Asher is a single chamber, automatic microprocessor-controlled photoresist stripper that is set up for 4″ – 6″ wafers. It is configured for up to 6″ wafers and has independent control of pressure, RF power, temperature, gas flow, & substrate position. The Matrix 105 Asher has a 600W RF water-cooled generator and a multi-step program (three steps + over etch) process program. It also has a “Butterfly” Valve for more precise pressure control and a phase magnitude detector to provide real-time RF impedance matching control. The Matrix 105 Asher has two Mass Flow Controllers and a Vacuum Hose Assembly. The range for Strip is 150C to 250C +/-5C and the range for Descum is 70C to 150C +/-5C. It also has a Wafer Lift Pin Assembly (up and down).Documents
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
125985
Wafer Sizes:
3"/75mm, 4"/100mm, 5"/125mm, 6"/150mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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MATRIX
105
CATEGORY
Ashers / Plasma Cleaner
Last Verified: Over 30 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
125985
Wafer Sizes:
3"/75mm, 4"/100mm, 5"/125mm, 6"/150mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available