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LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
  • LAM RESEARCH / NOVELLUS / GASONICS L3510
Description
GASONIC L3510 Single Wafer Downstream Photoresist Asher
Configuration
8” configured (can change to 6”) Quartz Plasma Tube and Baffles ASTEX Microwave 1.2kw Temperature Controlled Wafer Cooled Aluminum Process Chamber Robotic Pick and Place Wafer Handler ( KORO ) Fixed Position Single Cassette Station Downstream End Point Detection SEMI SECS ⅱ Software 2 Gas Mass Flow Controller : O2 4slpm , N2 2slpm System Power : 208 VAC , 60 A, 3 Phase, 50/60Hz
OEM Model Description
PEP3510A is a dry chemistry downstream processing system for photoresist removal, manufactured by GaSonics. It incorporates the company’s proprietary microwave downstream processing technology and is designed for advanced IC manufacturers. The system can handle feature sizes of 0.25 microns and below, with throughput rates ranging from approximately 45 to 55 wafers per hour.
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PREFERRED
 
SELLER
CATEGORY
Ashers / Plasma Cleaner

Last Verified: Over 60 days ago

Buyer pays 12% premium of final sale price
Key Item Details

Condition:

Used


Operational Status:

Unknown


Product ID:

82160


Wafer Sizes:

8"/200mm


Vintage:

1996


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Similar Listings
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PREFERRED
 
SELLER

LAM RESEARCH / NOVELLUS / GASONICS

L3510

verified-listing-icon
Verified
CATEGORY
Ashers / Plasma Cleaner
Last Verified: Over 60 days ago
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Buyer pays 12% premium of final sale price
Key Item Details

Condition:

Used


Operational Status:

Unknown


Product ID:

82160


Wafer Sizes:

8"/200mm


Vintage:

1996


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
GASONIC L3510 Single Wafer Downstream Photoresist Asher
Configuration
8” configured (can change to 6”) Quartz Plasma Tube and Baffles ASTEX Microwave 1.2kw Temperature Controlled Wafer Cooled Aluminum Process Chamber Robotic Pick and Place Wafer Handler ( KORO ) Fixed Position Single Cassette Station Downstream End Point Detection SEMI SECS ⅱ Software 2 Gas Mass Flow Controller : O2 4slpm , N2 2slpm System Power : 208 VAC , 60 A, 3 Phase, 50/60Hz
OEM Model Description
PEP3510A is a dry chemistry downstream processing system for photoresist removal, manufactured by GaSonics. It incorporates the company’s proprietary microwave downstream processing technology and is designed for advanced IC manufacturers. The system can handle feature sizes of 0.25 microns and below, with throughput rates ranging from approximately 45 to 55 wafers per hour.
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