LAM RESEARCH / NOVELLUS / GASONICS L3510

Description

No description

Configuration

- Software version: 7.5 gem - MW Power: 1.25kw (Model C12935) - Gas: 2 gas O2 & N2 - Brooks Zbot Robot

OEM Model Description

PEP3510A is a dry chemistry downstream processing system for photoresist removal, manufactured by GaSonics. It incorporates the company’s proprietary microwave downstream processing technology and is designed for advanced IC manufacturers. The system can handle feature sizes of 0.25 microns and below, with throughput rates ranging from approximately 45 to 55 wafers per hour.