LAM RESEARCH / NOVELLUS / GASONICS PEP 3510A

Description

Photoresist stripping system

Configuration

Software version: 4.0 CIM: GEM Handler system: XU-RCM4700 (Yaskawa robot assy) Does not include: Dry pumps LPT

OEM Model Description

PEP3510A is a dry chemistry downstream processing system for photoresist removal, manufactured by GaSonics. It incorporates the company’s proprietary microwave downstream processing technology and is designed for advanced IC manufacturers. The system can handle feature sizes of 0.25 microns and below, with throughput rates ranging from approximately 45 to 55 wafers per hour.