
Description
KLA Altair 8920i AOI Tool KLA Altair 8920i Wafer Frontside Automatic Optical Inspection Tool Combines Brightfield & Darkfield Defect Detection with Flexible LED Illumination Fastest Available Excursion Monitoring Capability for >0.2 um Defects Phoenix 3.0 EFEM with 3ea Loadports for 6” & 8” Wafers High Performance Inspection Objectives: 2X, 3.5X, 5X, 10X High Performance Review Objective: 35X Low Warpage Chuck for 6” & 8” Wafers Multi-Region Based Thresholding Advanced Detection Algorithms Automated Review Sampling Brightfield Review Mode Litho Bevel Centricity Autofocus Capability Rules Based BinningConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents
Verified
CATEGORY
AOI
Last Verified: 8 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
153745
Wafer Sizes:
Unknown
Vintage:
2021
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
Altair 8920i
CATEGORY
AOI
Last Verified: 8 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
153745
Wafer Sizes:
Unknown
Vintage:
2021
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
KLA Altair 8920i AOI Tool KLA Altair 8920i Wafer Frontside Automatic Optical Inspection Tool Combines Brightfield & Darkfield Defect Detection with Flexible LED Illumination Fastest Available Excursion Monitoring Capability for >0.2 um Defects Phoenix 3.0 EFEM with 3ea Loadports for 6” & 8” Wafers High Performance Inspection Objectives: 2X, 3.5X, 5X, 10X High Performance Review Objective: 35X Low Warpage Chuck for 6” & 8” Wafers Multi-Region Based Thresholding Advanced Detection Algorithms Automated Review Sampling Brightfield Review Mode Litho Bevel Centricity Autofocus Capability Rules Based BinningConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents