KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

Altair 8920i

KLA Altair 8920i AOI Tool

KLA Altair 8920i Wafer Frontside Automatic Optical Inspection Tool

Combines Brightfield & Darkfield Defect Detection with Flexible LED Illumination

Fastest Available Excursion Monitoring Capability for >0.2 um Defects

Phoenix 3.0 EFEM with 3ea Loadports for 6” & 8” Wafers

High Performance Inspection Objectives: 2X, 3.5X, 5X, 10X

High Performance Review Objective: 35X

Low Warpage Chuck for 6” & 8” Wafers

Multi-Region Based Thresholding

Advanced Detection Algorithms

Automated Review Sampling

Brightfield Review Mode

Litho Bevel Centricity

Autofocus Capability

Rules Based Binning

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Automatic Optical Inspecion Tool, for 6" & 200mm Wafers

Altair 8920i

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Altair 8920i

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Altair 8920i

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