TAKANO / TOPCON 

MI-2080

WM-7S

WM-7SR

Vi-1202	

MI-5080

Mega-contrast measurement
Capable of measuring wide dynamic range from ultra-low luminance of 0.0005cd/m² to ultra-high of 5,000,000cd/m².

SR-LEDW

Topcon: WM-1010 particle detection tool, 4/5/6-inch-compatible, 0.1-micron resolution.

WM-1010

Topcon: MI-1 wafer inspection tool, inspects patterned wafers.

MI-1

VI-4202

WM-5000

Light source: Argon ion laser
Detecting/scanning method: Scattered light detecting / helical scanning method
Detectivity: Bare 0.055 microns / film 0.07 microns
Dynamic range: 0.055 microns to 5 microns
Reproducibility: σn /≦1%
Wafer Size 200/150mm

TAKANO / TOPCON

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MI-2080

WM-7S

WM-7SR

Vi-1202

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