WM-2500
Category
Reticle / Mask InspectionOverview
Light source: Argon ion laser Detecting/scanning method: Scattered light detecting / helical scanning method Detectivity: Bare 0.055 microns / film 0.07 microns Dynamic range: 0.055 microns to 5 microns Reproducibility: σn /≦1% Wafer Size 200/150mm
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2
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