
Introducing IL 3000, the cutting-edge solution for unpolished 300mm wafers with deep marking capabilities. Experience seamless automatic handling and precise alignment of the wafers. With up to four cassette stations, it maximizes efficiency. Additionally, IL 3000 offers a range of optional features, providing a customizable and versatile solution to meet your specific needs. Simplify your wafer processing with IL 3000.

INNOLAS

ILC 3000

ILSTT-DS

Introducing IL 1000, the compact and efficient wafer processing system. It accommodates 2-inch to 200mm wafers seamlessly without mechanical adjustments. Experience automated handling and precise alignment with a single cassette station, resulting in a small footprint. Ideal for medium production volume, IL 1000 streamlines your wafer processing needs.

IL 1000

IL 2600	

ILS 700P	

C 3000 DPS


Introducing IL 2000, the versatile wafer processing system. It effortlessly handles 2-inch to 200mm wafers without mechanical adjustments. Enjoy seamless automatic handling and alignment of wafers with up to four open cassette stations. Its capabilities extend to sorting, making it ideal for high-volume production. Simplify your wafer processing needs with IL 2000.

INNOLAS

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