Description
No warranty Spares Ethanol tank- 1 Trap tank - 1 RF Generator ENI - OEM 1250- 1 Transfer Module/Process Module Computer- 1 CTC Computer- 1 Brooks Power Supply- 1 Bay Voltex HREHT-0650-DC-G- 1Configuration
Process- MOCVD Ta(OC2H5)5 Operating System- Windows XP Professional Platform Model- Brooks MX700 Process Module- 2 Wafer Transfer Robot- Brooks MagnaTran™ 7.1 Transfer Robot Arm- Leap Frog GEM/SECS Interface- HSMS Heat Exchanger- Bay Voltex HREHT-0650-DC-G RF Generator- ENI - OEM 1250 Vaccum Load Lock- Brooks VCE 6 Vacuum Cassette Elevator SMIF- ASYST SMIF LPI 2200 Vacuum Pump - Process pump - Ebara EVM202NBE LDS pump - EVS100P Load lock pump - Kashiyama TS310X Transfer Module pump - Kashiyama TS310X GRC- Edward D150 Dual Gas Reactor Column LDS System- Y Fire Distinguisher System- Y MFC Argon (Horiba)- 300SCCM Argon (Horiba)- 5000SCCM Argon (Horiba)- 1000SCCM O2 (Horiba)- 500SCCM SF6 (UNIT)- 500SCCM LFM - (OC2H5)5 (Horiba)- 0.1g/minOEM Model Description
None ProvidedDocuments
Verified
CATEGORY
ALD
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Running
Product ID:
113491
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
JUSUNG
EUREKA 2000
CATEGORY
ALD
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Running
Product ID:
113491
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available