
Description
Atomic layer deposition mainframeConfiguration
ALD Main system: (Qty 2) Chambers Front end with load ports Vacuum transfer module FOUP Does not include: (Qty 2) Gate valves (Qty 3) Computers Back end robot (Qty 2) Chamber kitsOEM Model Description
None ProvidedDocuments
No documents
ASM
Eagle XP4
CATEGORY
ALD
Last Verified: 12 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
151294
Wafer Sizes:
12"/300mm
Vintage:
2012
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Atomic layer deposition mainframeConfiguration
ALD Main system: (Qty 2) Chambers Front end with load ports Vacuum transfer module FOUP Does not include: (Qty 2) Gate valves (Qty 3) Computers Back end robot (Qty 2) Chamber kitsOEM Model Description
None ProvidedDocuments
No documents