Description
No descriptionConfiguration
-Handedness: Inline left (std) or right -Altitude: Varies by site -Lens Type: 4aN8EK (D type lens) -Numerical Aperture: 0.85~1.35 -sPURE (subject to availability) -Quick Reticle Change (QRC) -Aerial Image Sensor (AIS) -AIS-RA (AIS-Reticle Alignment) -iPot(integrated projection optics tester) -5-eye Field Image Alignment system (FIA) -Excimer laser with Advanced Spectral Control (ASC) -Hard Aperture: 11slots (Cross Hair, Annular, AIS-coma etc) -POLANO -Beam Matching Unit -25-wafer FOUP port -Pre-alignment matching to other NSR -6" reticle size -Position of Reticle SMIF loadport: Right hand operation -2 Reticle SMIF loadports -12-slot reticle buffer -SEMI 2D Reticle Barcode Reader -Reticle Prealignment -Reticle Autofocus -PPD(Pellicle Particle Detector) -PPD Pellicle Height Error Warning -CDA Purge Kit Systems Computers: -UIP (Operational Computer) Operating System: Windows Embedded -SQP (Sequence Processing Computer) Operating System: VMS -SVR (File Server) Operation System: Linux -eXDP (Data Collection Server) Operation System: Windows SeverOEM Model Description
NSR-S621D (resolution ≦ 38 nm).Documents
No documents
NIKON
NSR-S621D
Verified
CATEGORY
193 Immersion Lithography
Last Verified: 18 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
103696
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
NIKON
NSR-S621D
CATEGORY
193 Immersion Lithography
Last Verified: 18 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
103696
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
-Handedness: Inline left (std) or right -Altitude: Varies by site -Lens Type: 4aN8EK (D type lens) -Numerical Aperture: 0.85~1.35 -sPURE (subject to availability) -Quick Reticle Change (QRC) -Aerial Image Sensor (AIS) -AIS-RA (AIS-Reticle Alignment) -iPot(integrated projection optics tester) -5-eye Field Image Alignment system (FIA) -Excimer laser with Advanced Spectral Control (ASC) -Hard Aperture: 11slots (Cross Hair, Annular, AIS-coma etc) -POLANO -Beam Matching Unit -25-wafer FOUP port -Pre-alignment matching to other NSR -6" reticle size -Position of Reticle SMIF loadport: Right hand operation -2 Reticle SMIF loadports -12-slot reticle buffer -SEMI 2D Reticle Barcode Reader -Reticle Prealignment -Reticle Autofocus -PPD(Pellicle Particle Detector) -PPD Pellicle Height Error Warning -CDA Purge Kit Systems Computers: -UIP (Operational Computer) Operating System: Windows Embedded -SQP (Sequence Processing Computer) Operating System: VMS -SVR (File Server) Operation System: Linux -eXDP (Data Collection Server) Operation System: Windows SeverOEM Model Description
NSR-S621D (resolution ≦ 38 nm).Documents
No documents