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<b>2300v2</b> Mainframe Serial Number : 1001862-04-19-02493 Chamber Type Serial Number PM 1 Versys Star 23PLO702 PM 2 Versys Star 23PLO464 PM 3 Versys Star 23PLO465 PM 4 2300 Microwave Strip 23MWS080 <b>Mainframe</b> • Number of Cassette / FOUP Positions : 3 • Loadport Make/Model : 3LPM • Software Version : 1.8.4 SP5 HF2 • Signal Lamp Tower • Remote Operator Interface • Robot Type : ATR8 / MAG7 • Robot Part Number : 138150 / 108000-37 • CE Mark Certified • Electrical Requirements : 208V 3PH 50/60HZ <b>Versys Star Chambers</b> • Endpoint Type: Optical Emission Spectrometer • Turbo Pump: ALCATEL ATH 2300 M • RF Generator: AE RFDS 1250 <b>2300 Microwave Strip Chamber</b> • Microwave Generator: MKS FI20160-3 <b>Pumps/Chillers</b> • Loadlock Pump: BOC EDWARDS IPX100 • Etch Chamber Pump: Qty 4 - ALCATEL 602P • Chiller: Qty 3 - BOC EDWARDS 40/80 PLUS <div style="margin-left: 40px;">Electrical Requirements : 200/208 VAC 3 PH 50/60 HZ 30A</div> <b>Gas Box Configuration</b> • Mounting Location : Side • MFC Make and Model : CELERITY UFC1661 / HORIBA Z 313 • Gas Box P/N – PM1 : NA • Gas Box P/N – PM2 : 571-004400-004 • Gas Box P/N – PM3 : 571-004400-004 • Gas Box P/N – PM4 : 571-004400-004 <b>Gas Configuration</b> Line PM 1 PM 2 PM 3 PM 4 1 SiCl4_5 SiCl4_5 SiCl4_5 N2_1000 CELERITY CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 UFC1661 2 N2_200 N2_200 N2_200 O2_5000 CELERITY CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 UFC1661 3 Cl2_200 Cl2_200 Cl2_200 CF4_100 HORIBA HORIBA HORIBA CELERITY Z 313 Z 313 Z 313 UFC1661 4 He_500 He_500 He_500 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 5 O2_200 O2_200 O2_200 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 6 He_500 He_500 He_500 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 7 Ar_200 Ar_200 Ar_200 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 8 CH2F2_100 CH2F2_100 CH2F2_100 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 9 O2_20 O2_20 O2_20 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 10 SF6_200 SF6_200 SF6_200 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 11 CF4_200 CF4_200 CF4_200 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 12 CHF3_100 CHF3_100 CHF3_100 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661OEM Model Description
The 2300 Versys is a part of Lam’s 2300 etch series, which is a low-risk solution for sub-100-nm volume production on 300-mm substrates. It has a compact design that reduces floor space while providing full service access. The Versys conductor etch systems rely on Lam’s Transformer Coupled Plasma™ source and deliver superior performance. It also reduces cost of ownership to compete with the lowest cost systems in the industry.Documents
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LAM RESEARCH CORPORATION
2300 VERSYS
Verified
CATEGORY
RIE
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
18773
Wafer Sizes:
8"/200mm
Vintage:
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
LAM RESEARCH CORPORATION
2300 VERSYS
Verified
CATEGORY
RIE
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
18773
Wafer Sizes:
8"/200mm
Vintage:
2004
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
<b>2300v2</b> Mainframe Serial Number : 1001862-04-19-02493 Chamber Type Serial Number PM 1 Versys Star 23PLO702 PM 2 Versys Star 23PLO464 PM 3 Versys Star 23PLO465 PM 4 2300 Microwave Strip 23MWS080 <b>Mainframe</b> • Number of Cassette / FOUP Positions : 3 • Loadport Make/Model : 3LPM • Software Version : 1.8.4 SP5 HF2 • Signal Lamp Tower • Remote Operator Interface • Robot Type : ATR8 / MAG7 • Robot Part Number : 138150 / 108000-37 • CE Mark Certified • Electrical Requirements : 208V 3PH 50/60HZ <b>Versys Star Chambers</b> • Endpoint Type: Optical Emission Spectrometer • Turbo Pump: ALCATEL ATH 2300 M • RF Generator: AE RFDS 1250 <b>2300 Microwave Strip Chamber</b> • Microwave Generator: MKS FI20160-3 <b>Pumps/Chillers</b> • Loadlock Pump: BOC EDWARDS IPX100 • Etch Chamber Pump: Qty 4 - ALCATEL 602P • Chiller: Qty 3 - BOC EDWARDS 40/80 PLUS <div style="margin-left: 40px;">Electrical Requirements : 200/208 VAC 3 PH 50/60 HZ 30A</div> <b>Gas Box Configuration</b> • Mounting Location : Side • MFC Make and Model : CELERITY UFC1661 / HORIBA Z 313 • Gas Box P/N – PM1 : NA • Gas Box P/N – PM2 : 571-004400-004 • Gas Box P/N – PM3 : 571-004400-004 • Gas Box P/N – PM4 : 571-004400-004 <b>Gas Configuration</b> Line PM 1 PM 2 PM 3 PM 4 1 SiCl4_5 SiCl4_5 SiCl4_5 N2_1000 CELERITY CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 UFC1661 2 N2_200 N2_200 N2_200 O2_5000 CELERITY CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 UFC1661 3 Cl2_200 Cl2_200 Cl2_200 CF4_100 HORIBA HORIBA HORIBA CELERITY Z 313 Z 313 Z 313 UFC1661 4 He_500 He_500 He_500 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 5 O2_200 O2_200 O2_200 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 6 He_500 He_500 He_500 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 7 Ar_200 Ar_200 Ar_200 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 8 CH2F2_100 CH2F2_100 CH2F2_100 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 9 O2_20 O2_20 O2_20 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 10 SF6_200 SF6_200 SF6_200 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 11 CF4_200 CF4_200 CF4_200 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 12 CHF3_100 CHF3_100 CHF3_100 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661OEM Model Description
The 2300 Versys is a part of Lam’s 2300 etch series, which is a low-risk solution for sub-100-nm volume production on 300-mm substrates. It has a compact design that reduces floor space while providing full service access. The Versys conductor etch systems rely on Lam’s Transformer Coupled Plasma™ source and deliver superior performance. It also reduces cost of ownership to compete with the lowest cost systems in the industry.Documents
No documents