Used LAM RESEARCH CORPORATION 2300 VERSYS KIYO for Sale

Description

No description

Configuration

Process: POLYETCH Tool config is based on original PO, please verify tool details at tool inspection <span style="font-size: 14px;">FI SN: </span>1017439-10-38-0839 System Type Complete System 12300 Version 2 (4 VPM) V2 platform supports up to 4 process chambers. 1Wafer Size 300 mm wafers 1Wafer Config SEMI 1Cassette Type 25 Slot Cassette 1Process Module Position and Quantity 2300 Versys Kiyo (PM1,2,3,4) 4Gas Box Type IGS Gas Box 4Chamber Type Versys Kiyo 4Chamber Pinnacle Standard Pinnacle (-814) 4Wafer Clamping Mechanism Center RF, Tunable ESC (-374) 4RF Strap RF Coupling Strap 4RF Ground Bracket Standard Fingers (-006) 4Edge Ring Quartz (EBP) 4Injector Alt 1 Injector (-026) 4Injector Shield Standard Injector Shield 4Plasma Screen Enhanced (-035) 4Gas Weldment Original (-103) 4ESC Hose Kit Low Temp 4ESC Facility Plate Compression Facility Plate 4Liner ACME Coated Universal (-838) 4Chamber Manometer Standard 4Wafer Lift Mechanism Prime Movers 4Voltage Control Interface 1200V 4O-rings Chemraz 4TCP Coil Standard 4TCP Source Dual 1500W 4300MM Turbo Pump 2200 L/s BOCE (Seiko Seiki) 4Heated Foreline Heated 4Heated Foreline Clamp Covers Yes 4Endpoint Detection OES2 4Chamber Viewport Window Standard 4Chamber Isolation Valve Barrier Seal Door 4Vacuum Valve Viton 4Water Control Passive RF PCW Control 4Service Covers Standard 4TCU to PM 50ft (Default) 4Pump to PM 100ft 4Facilitization No Gas Interface Box 0Future PM Position 1, 2, 3, 4 0Gas System Exhaust Top Exhaust 4Gas Line 16 Gas Configuration 4Heated Gas Lines Heated Lines, Pos 1 & 2 4Gas Line 1 SiCL4 100 sccm - STEC Z313 4Gas Line 2 CL2 500 sccm - STEC D213 4Gas Line 3 HBr 500 sccm - STEC D213 4Gas Line 4 CF4 400 sccm - STEC D213 4Gas Line 5 O2 500 sccm -STEC D213 4Gas Line 6 He 500 sccm - STEC Z313 4Gas Line 7 CH2F2 200 sccm - STEC D213 4Gas Line 8 Ar 1000 sccm - STEC D213 4Gas Line 9 HeO2 (30% O2) 50 sccm - STEC Z313 4Gas Line 10 NF3 1000 sccm - STEC D213 4Gas Line 11 N2 (Process Grade) 250 sccm - STEC Z313 4Gas Line 12 SO2 200 sccm - STEC Z313 4Gas Line 13 NA 0Gas Line 14 NA 0Gas Line 15 NA 0Gas Line 16 NA 0Gas Box Inlet Option Regulated Inlet Gas Panel 1ATM Front End Load Port 3 FOUP BROOKS 4ATM Cassette ID Hermos Carrier ID 4ATM, Factory Automation OHT PIO Sensor 4ATM Input Buffer Station 25 Slot 2ATM, CTC Computer, Storage Hard Disk Drive - Mirrored 1VTM Loadlock A Standard 1VTM Loadlock B Standard 1Subpanel RPDB 1Signal Tower R-O-G-B Signal Tower 1PM Peripherals: Backing Pumps ESR100WN 4 EbaraRPDB: Backing Pump CB Sizes 30A 4TCU Config YR-8020 4 MaruyamaRPDB: TCU CB Sizes 30A 4Critical Parts PCB,VIOP BOARD 4 810-099175-011Critical Parts VME 7668A CPU board 4 605-109114-001 Critical Parts ASSY,ENCL,DC CONT 4 853-800087-405Critical Parts ASSY,ENCL,AC,2300 PM 4 853-800083-346Critical Parts WDO, GAS, INJ, F SEAL, QRTZ, NSG 4 716-012640-013Critical Parts Top Chamber ACME Coated 4 715-027638-814Critical Parts ESC,TUNABLE,COUL,CNTR RF,300MM 4 839-019090-374Critical Parts PCBA,ESC FILTER, BICEP Q 4 810-495659-304Critical Parts FRU,ASSY,BIAS MTCH,2300 4 832-038915-001Critical Parts CA,COAX,RF,HN-90,TO,HN-90,11FT 4 834-036619-011Critical Parts GEN,APEX,1.5KW,13.56MHz, F47,H,P4,-2000Hz 4 660-032596-214Critical Parts COUPLER,RF,ESC,BIAS COAX FEED 4 839-046079-002Critical Parts BRKT,RF GND,BIAS ELECT ASSY 4 715-039685-006Critical Parts WDO, SAPPHIRE, 25MMX.087 4 716-008608-001Critical Parts SLV,GND SHLD,TCP GAS INJ,NO Ni 4 715-016744-016Critical Parts SCRN,PLASMA,DUAL GAS ZONE.2300 4 713-012641-035Critical Parts Gas Injector Weldment : Stainless 4 839-031197-103Critical Parts HOSE,DUAL INSUL,ESC TEMP CTRL,RET-SUP 4 839-028991-001Critical Parts "LIN, 2300, UPR CHMB, COATED(chamber liner)" 4 715-801021-838Critical Parts LIN, MTG PL, ESC, 300MM 4 714-801511-002Critical Parts HSG,BIAS ELCTD,300MM (ESC toilet bowl) 4 715-800326-004Critical Parts MNMTR,ETCH,100MT (MKS 100mT manometer) 4 796-019591-004Critical Parts MNMTR,2STPT,100 DEG C,KF16,10T (MKS 10Torr manometer) 4 685-097330-006Critical Parts PIN,FLEX,300MM PIN LFT,.042 (lift pins) 4 715-800621-003Critical Parts FTG,TUBE,FIXED ORF,CHK VLV,AIR,SMC (pin speed mod) 4 920-058481-002Critical Parts ACTR,BLWS.PINLIFT,.395 STROKE, 4 790-022848-114Critical Parts "ASSY,VOLTAGE DETECTOR,ESC,2300Z1SY,VOLTAGE/DET,ESC,2300,10-8" 4 853-002499-007Critical Parts ASSY, S/G COIL, 1.5T OUT, 2T IN 4 853-031436-103Critical Parts GEN,APEX,1.5KW,13.56MHz, F47,H,P4+2000Hz 4 660-032596-213Critical Parts FRU,ASSY.ENCL.TCP MTCH,KIYO 23 4 832-034908-009Critical Parts CA,COAX,RF,HN-90,TO,HN-90,18FT 4 834-036619-018Critical Parts PMP,TURBO,2.2K L/S,ISO 250-F,T 4 796-900373-003Critical Parts KIT,HEATERS,FORELINE, SEIKO 2200,IGS 4 857-000178-015Critical Parts SPEC. OES2, ENDPOINT, VS70-S98 4 685-069171-002Critical Parts WDO,QUARTZ 4 716-027740-001Critical Parts KIT,PM, VAT RKR VLV INSTALL 4 857-083111-005Critical Parts KIT,PM DR, VAT RCKR VLV,BARRIER 4 857-083115-001Critical Parts GTV,CONT,250 MM FLG,SER 65,VAL 4 796-901160-009Critical Parts O-RING, ARMOR CRYSTAL, 10.484 ID X .139W 4 734-112249-275Critical Parts XDCR.PRESS,-15 TO 235 PSIG,T3,NO DISPLAY 4 771-036638-003 Damage/Missing parts listPlease inspect tool to reconfirmDry pumps not included on sales

OEM Model Description

The 2300 Versys Kiyo is a manufacturing tool designed for 65 nm and beyond. It provides excellent uniformity and defect control on a reliable wafer transport system. The symmetric chamber and radial tuning features produce uniform etch results for advanced devices. It employs proprietary technology for process repeatability, low defect, and metal contamination results. It supports conventional applications such as gate and shallow trench isolation (STI) and emerging applications such as high k dielectric removal, critical spacer etch, and lithography-enabling etch steps. The system can be upgraded from the 2300 Versys Star, providing an investment-extending strategy.