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AMAT / APPLIED MATERIALS MIRRA

Created On
March 15th, 2019
Guaranteed Accurate as of
a month ago
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March 15th, 2019
a month ago
Copied!
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Product ID
18233
Make
AMAT / APPLIED MATERIALS
Model
MIRRA
Category
Wafer Grinding, Lapping, Polishing
Quantity
1
Serial Number
-
Vintage
1999
Wafer Size
8"/200mm
Condition
As-Is
Other Information
Configuration
<span style="font-family: calibri,sans-serif;">• Wafer Size (inches) : 8 • Install Type : Through-the-wall • Year of Manufacture: 1999 • Software Version : MB59c3 • CPU Board Type : Pentium 3       400MHz or Higher : Yes • Electrical Requirements : 200/208VAC • Process Type: Polysilicon • Mainframe: Mirra Track o Dry In/Dry Out o Signal Lamp Tower o Integrated SMIF (qty 3 loaders)  o Cassette Tank : Standard  o Robot Type : 112”  o Cleaner Type : Ontrak  o Cleaner Chemicals Used : CP72 o E-Chain Lifetime : Since installation o Cleaning Package : No o Spray Gun : Single o In-Situ Removal Rate Monitor : Motor Torque o Metrology Option : None  o IPM : No <b>• Mirra Polish Heads</b> o Titan 1 Polish Heads o PPS Retaining Rings o Standard Wafer Loss Sensor <b>• Mirra Platens</b> o Teflon Coated Platens : No o Pad Type : IC 1000 o Pad Conditioner Head : P4 Intel o Pad Conditioner Disc : EWHA   o Universal Disk Holder : No o Temperature Control : None  <b>• Slurries</b> o Slurries/Platen Used : 1 o Chemicals Used : Oxide Slurry o Flow Rate : Standard   o Dispense Arm : Standard   o Slurry Flow Monitors : Yes </span>  
Description
-
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Installation
Refurbished
Various / Other
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OEM Model Description
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