The D8 FABLINE provides fully automated handling of 300mm wafers . It provides a wide spectrum of techniques, such as rapid X-ray reflectivity (XRR), grazing incidence X-ray diffraction (GID), and high-resolution X-ray diffraction (HR-XRD) in order to facilitate advanced process development and control on strained devices and high-K thin films, as well as materials characterization for future generation technology nodes.

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D8 FABLINE

The Bruker D8 DISCOVER is an advanced X-ray diffraction platform with a wide range of applications in high-performance materials research and methodology development. It incorporates state-of-the-art technology, including the unique ability to perform in-plane grazing incidence diffraction (IP-GID). The system serves as a versatile laboratory platform for developing new methodologies that can be seamlessly transferred to the D8 FABLINE tool, enabling smooth implementation in semiconductor fabs.

D8 DISCOVER

S4 EXPLORER

QUANTAX 200

D4 ENDEAVOR

D2 PHASER

D8 ADVANCE Series II

AXS D8

The D2 CRYSOTM is the worldwide first and only benchtop device for a fast X-ray spectroscopic determination of the crystallographic orientation of single crystals applying a patented energy-dispersive method. In addition to the main orientation (surface orientation) the orientation of a second crystallographic direction (flat position, azimuthally orientation) can be determined without changing the position of the analyzed crystal. The measurement and analysis are performed fully automatically after the 
establishment of measurement directives. Thus, the D2 CRYSO is especially suitable for routine measurements connected to the crystal confectioning or the quality control. A process-oriented application of the benchtop system is possible. Crystals can be measured in form of wafers, plates or discs with at least one defined flat surface. The device concept and beam guide allows a simple handling of samples.

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D8 FABLINE

D8 DISCOVER

QUANTAX 200

D4 ENDEAVOR

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